Branche(s) enseignée(s)

The lecture explains to the basics of semiconductor physics by introducing the band diagram for understanding the electronic behaviour of semiconductors. In a next step, devices such as solar cells, Light emitting diodes LEDs, Field effect transistors and other devices are explained and it becomes obvious that understanding the band diagram becomes an essential tool for constructing such devices and being able participating in innovations.

In this lecture the fundamental technologies of modern micro technologies are studied. These technologies are:
patterning techniques by photolithography using direct etching and lift-off. Further techniques for selective etching of materials apart from using acids and bases are: serial dry etching by Laser ablation, and parallel dry etching techniques by DRIE (deep reactive ion etching). As assembling techniques that are commonly used in micro technique are anodic bonding as for joining silicon and glass. Furthermore, polymer / plasma -based assembling techniques will be applied for creating fluidic structures.
In parallel to the lecture in micro technology, all techniques are applied in practical work in an clean-room environment. Here the student will get a full introduction to security issues, how to work with dangerous substances to protect himself, the facilities in the clean-room and finally the environment by the application of professional recycling. In the second year of the practical work, the student will get a silicon wafer and will carry out all patterning and coating steps to create a photodiode.
In the third year, the lecture and the practical work will be completed in order to deliver a competence to the student that make him to be a valuable expert in all fields of clean-room based micro technology

Sensors are fundamental devices allowing to support human sensing to be treated, stored, and evaluated by computer controlled systems. In this lecture, e.g. temperature sensing is studied looking at the different physical principles allowing contactless temperature sensing, sensing in the high temperatures regime, and sensing at very high sensibility. The student will be encouraged to see himself to be placed in office for consulting. At the end of the lecture, he should be able to suggest to a potential customer the best solution for sensing in terms of reliability, low-cost, or the need to design particular solutions for a problem.

Solar cells are new devices that have a brilliant future for energy conversion from sun-light to electricity. At the beginning of the lecture an overview of the most important renewable energy production methods together with a critical analysis of the “biosphere” requirement will be given.
Looking at photovoltaics, fundamentals of semiconductor physics will first ty to sketch the limits given by nature. In a second step using the band structure model, the student will be able to virtually "construct" solar cells and he will be able to know the advantage and disadvantages. However, the physics of semiconductors is not the only actual problem to implement, aspects as technology to manufacture the solar cells in an economic way together with the use of exclusively such materials that fit well into environmental cycles. This cycle  starts with large industrial manufacturing scenarios, and will end with recycling being compatible with sustainable quality of life for future generations.

This lecture looks at the requirements of modern biomedical engineering in the field of orthopaedic techniques, micro chirurgic interventions as “problem solver” going to smaller and smaller features such as implants and devices that are used e.g. for in vivo and in-vitro diagnosis. The 50 year’s development that has been carried out in the field of micro technology is seen as extremely large and valuable tool box (push), combining an already established offer with a demand for devices that is continuously (pull).
The lecture gives a large introduction showing to the possibilities of micro technologies and draws the link to concrete solutions that are already used in daily surgery scenarios. The lecture looks also to innovations because the potential that is offered by micro technology to the demand in biomedical engineering, is, by far, not at its end. a huge innovation potential is presented to the students.

Plasmas are poorly understood by science, however there is a continuous increase of applications and markets where plasma solutions are asked for. Plasma processes become part of our daily life for a long time, looking at fluorescent lamps for low power illumination, further for chemical to mechanical energy conversion in combustion engines. Looking recent modern developments, solar cell manufacturing became a large market as well as the manufacturing of flat panel displays, and other decorative and functional coatings. Plasma technology helps reducing the overall process energy, hence it is an important contribution for general process energy reduction. The most important processes are sputtering and plasma enhanced chemical vapour deposition (PECVD). In the lecture the understanding of plasmas from the very beginning is given and further illustrated to understand the requirements of today’s industrial solutions.